Axcelis Technologies Inc.

Mary Puma has been Axcelis' Chairman since May of 2005 and CEO since January 2002. She played an instrumental role in the company's spin off from Eaton Corporation in 2000, when she was named president and chief operating officer. Puma joined the semiconductor business in 1998, when it was Eaton's Semiconductor Operation, first serving as the vice president of its implant business and then as the vice president for the total operation. Puma joined Eaton in May 1996 as the general manager of the company's commercial controls division. Prior to joining Eaton, she spent 15 years in various marketing and general management positions at five different General Electric business units. Puma holds a BA in economics, Phi Beta Kappa, from Tufts University and an MS in management from the MIT Sloan School. She is a member of the boards at Nordson Corporation, North Shore Medical Center and Semiconductor Equipment and Materials International (SEMI).

Craig Halterman, 45, has been our Chief Information Officer since July 2000 and a Senior Vice President since May 2005, before which he was a Vice President since July 2000 and our Director of Information Technology since the beginning of 2000. Prior to joining us, Mr. Halterman was Information Technology Director at Honeywell/AlliedSignal in its defense and space systems business since 1997. Before that, Mr. Halterman held various information technology positions at The Dow Chemical Co., Thompson Consumer Electronics, General Electric Co. and RCA Consumer Electronics.

Stephen Bassett joined Axcelis in April 2004, after serving as Axcelis' interim chief financial officer for nearly a year. He is the former chief financial officer of Ezenia! Inc. Bassett has worked as an independent financial consultant and spent 15 years as an audit partner at Ernst & Young LLP, where he managed auditing services for a variety of organizations, ranging from multinational Fortune 500 companies to emerging businesses. Bassett holds a Bachelor of Science degree in Accounting from the University of Maine Orono.

Kevin J. Brewer, 50, is our Executive Vice President, Manufacturing Operations, a position he has held since November 2008, prior to which he had been Vice President of Manufacturing Operations since October 2002 and Director of Operations from 1999 to 2002. Prior to joining Axcelis in 1999, Mr. Brewer was Director of Operations, Business Jets at Raytheon Aircraft Company, a leading manufacturer of business and special mission aircraft owned by Raytheon Company, a manufacturer of defense, government and commercial electronics, as well as aircraft. Prior to that, Mr. Brewer held various management positions in operations and strategic planning in Raytheon Company's Electronic Systems and Missile Systems groups.

Lynnette Fallon oversees Axcelis' legal and human resources operations, and also serves as Axcelis' corporate secretary. She joined Axcelis in April 2001 as senior vice president and general counsel. Previously, Fallon spent nearly a decade as a partner in the Boston law firm of Palmer & Dodge LLP, where she was head of the Business Law Department from 1997 to 2001. Fallon holds a bachelor's degree from Vassar College and received her JD from Boston University School of Law.

Matthew Flynn is responsible for directing all sales, service and logistics efforts for the company. Flynn most recently held the position of director of sales, ion implant and RTP systems. Prior to joining Axcelis in 1996, Flynn held executive and management roles at Cherry Semiconductor and Teledyne. Flynn holds a BA in political science and a master's degree in public administration from the University of South Florida.

Bill joined Axcelis in early 2006 as Director of Marketing for CCS products and shortly thereafter became Vice President of Product Marketing where he expanded his responsibilities to include implant products as well. Prior to joining Axcelis, Bill was with Varian Semiconductor as Product Director for Medium Current and High Energy Ion Implant Systems. Before that, Bill was General Manager of the Materials Delivery Products Group at MKS Instruments and General Manager of the Thermal Processing Systems Division at Eaton Corporation. Bill holds a BSME and MSEE degree from Northeastern University.

As a veteran senior executive of the telecommunication industry, Brian has been instrumental in impacting the rise of competitive telecommunications both in the U.S. and abroad. Brian continues to head his own private equity investment and advisory firm, Universal Telecommunications, Inc, in Vienna, Virginia, focused on both start-up companies and consolidations taking place in the information/telecommunications industries. Brian currently serves as Chairman, Comsat International (CI), one of the largest independent telecommunications operators serving all of Latin America. He was previously Chairman and Chief Executive officer of Global TeleSystems Group, Inc. from March 1999 through September of 2000. He served as Chairman and CEO of LCI International, leading a turnaround of the company and developing it into one of the fastest growing telecommunications companies in the U.S. Subsequent to the merger of LCI with Qwest Communications International Inc. in June 1998, he became Vice Chairman of the Board for Qwest until his resignation. Brian was also the Executive Vice President of MCI Communications Corporation during its formative years as a long distance service company from 1981 to 1990 with responsibility for the company's eight operating divisions, including MCI International. He currently serves as a member of the board of directors of Bell Canada International Inc., ArrayComm, Inc., Axcelis Technologies, Inc., Sonus Technologies, and United Auto Group. Brian also serves as the U.S. co-chairman of the Global Information Infrastructure Commission, a multinational organization charting the role of the private sector in the developing global information and telecommunications infrastructure. Additionally, he is a member of the Irish Prime Minister's Ireland-America Economic Advisory Board.

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