Varian Semiconductor Equipment Associates Inc.

Mr. Dickerson has served as Varian Semiconductor s Chief Executive Officer and a Director of Varian Semiconductor since October 2004. Prior to joining Varian Semiconductor, Mr. Dickerson was President and Chief Operating Officer of KLA-Tencor from July 2002 to April 2004. From July 1999 to June 2002, he served as Chief Operating Officer of KLA-Tencor. Previously at KLA-Tencor, Mr. Dickerson was the Executive Vice President of the Customer Group from July 1997 to June 1999, Group Vice President for the Wafer Inspection Group from January 1996 to June 1997, and General Manager of the Wisard Division from July 1994 to December 1995.

Mr. Halliday has served as Varian Semiconductor s Executive Vice President and Chief Financial Officer since October 2006. From October 2004 to October 2006 he served as Executive Vice President, Treasurer and Chief Financial Officer. From November 2002 to October 2004, Mr. Halliday served as Varian Semiconductor s Vice President, Treasurer and Chief Financial Officer. From March 2001 to November 2002, Mr. Halliday served as Varian Semiconductor s Vice President and Chief Financial Officer. Prior to joining Varian Semiconductor, Mr. Halliday was Vice President and Chief Financial Officer of Unica Corporation, a software company. Previously, Mr. Halliday was at Ionics, Inc., a manufacturer of water treatment capital equipment. At Ionics, Inc., he was Chief Operating Officer in 2000; Vice President of the Consumer Water Group from 1996 to 2000; and Chief Financial Officer from 1990 to 2000. Mr. Halliday has been a director of Zoll Medical Corporation since July 2003.

Mr. Baker has served as Varian Semiconductor s Vice President of Finance since October of 2006. From June 2003 to October 2006, Mr. Baker was Varian Semiconductor s Corporate Controller and served as Operations Controller and Assistant Controller from February 2001 to June 2003. Mr. Baker was Chief Financial Officer of Chelton Microwave, a manufacturer of microwave components, from 1996 to 2001. Prior to that, he was Corporate Controller of Robertson-Ceco Corporation, a leading manufacturer of metal buildings.

Mr. Sullivan has served as Varian Semiconductor s Vice President, Customer Operations since November 2002. Mr. Sullivan was Varian Semiconductor s Vice President, Customer Operations and Chief Information Officer from November 1999 through November 2002. From 1995 to November 1999, he was Vice President, Customer Support of the Semiconductor Equipment Business at VAI.

Dr. Perlmutter has served as Varian Semiconductor s Executive Vice President of Implant Business Units since October 2006. Prior to joining Varian Semiconductor, Dr. Perlmutter was a Group Vice President of KLA-Tencor from July 2006 to October 2006. From October 2001 to June 2006, he served as Vice President and General Manager of KLA-Tencor s WIN Division - responsible for the brightfield and darkfield patterned wafer inspection product lines. Previously at KLA-Tencor, Dr. Perlmutter was Vice President and General Manager of the Surfscan Division from October 1999 to October 2001. From September 1995 to September 1999, Dr. Perlmutter served as a Sr. Director and then, Vice President of Engineering for KLA-Tencor s Reticle and Photomask Inspection Division.

Dr. Kim has served as Varian Semiconductor s Executive Vice President since October 2004. He has served as Varian Semiconductor s Vice President and General Manger of its Asia Pacific Operations since May 2000 and President of Varian Korea, Limited since April 1999. From April 1997 to March 1999, he Name and Title

Dr. Chen has served as a director of Varian Semiconductor since March 2004. Since July 2002, Dr. Chen has served as a Chief Executive Officer of Brion Technologies, Inc., a privately held technology company based in California. From October 1999 until July 2002, Dr. Chen was a Vice President in the Equity Research Department of J.P. Morgan Chase.