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	<title><![CDATA[fabrication facility Resources | BNET]]></title>
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		<title><![CDATA[A Simulation-Based Design Framework for Automated Material Handling Systems in 300mm Fabrication Facilities]]></title>
		<link><![CDATA[http://jobfunctions.bnet.com/abstract.aspx?docid=127002]]></link>
		<description><![CDATA[This paper describes a methodology to tackle the problem of designing Automated Material Handling Systems AMHS for 300mm wafer fabrication facilities. The proposed framework divides the design process into two levels: architectural and elaborative. Prior to the design, fab data are preprocessed using simulation of manufacturing operations. The output data...]]></description>
		<s:doctype><![CDATA[White papers]]></s:doctype>
		<pubDate>Fri, 31 Oct 2003 00:00:00 -0800</pubDate>
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