FSI International Inc.

Donald S. Mitchell, age 53, was named President and Chief Executive Officer of FSI in December 1999, appointed a director in March 2000 and became Chairman of the board on January 23, 2002. From its formation in 1998 until December 1999, he was President of Air Products Electronic Chemicals, Inc., a division of Pennsylvania-based Air Products and Chemicals, Inc. From 1991 to 1998, he served as President of Schumacher, Inc., a leading global chemical equipment and services supplier to the semiconductor industry. Mr. Mitchell served as the 1999-2000 Chairman of the Board of Directors of Semiconductor Equipment and Materials International ( SEMI ), a leading global industry trade association. Mr. Mitchell is also a director of Advanced Material Sciences, Inc., a privately-held manufacturer of thin substrate materials for the semiconductor industry.

Patricia M. Hollister has been a director since 2004. Since 1998 she has been the Chief Financial Officer of FSI International, Inc., a company that designs, manufactures, markets and supports equipment used in the fabrication of microelectronics. Prior to joining FSI in 1995, Ms. Hollister was employed by KPMG LLP, where she served for more than 12 years on various audit and consulting engagements, most recently as a Senior Manager. Ms. Hollister is a director of various FSI-owned foreign subsidiaries.

Scott Becker was named corporate vice president of marketing in May 2003. Previously he held the position of vice president of product management for FSI International's Surface Conditioning Division since August 2000. Employed at FSI from 1983 to 1985 as a Process Development Engineer, he rejoined FSI in 1992 as the single wafer product manager, adding the responsibility of chief technologist in 1999. From 1985 to 1992, he held management positions in engineering and business development for Honeywell's Solid State Electronics Division. He served four years as the co-chair of the Surface Prep Sub-Technology Working Group of the International Technology Roadmap for Semiconductors. Dr. Becker holds several wafer-cleaning patents and has authored many papers on cleaning technologies. He received his Ph.D. in Chemistry from the University of Notre Dame in 1984.

Eric Zettler is Director of Sales. Eric is an electrical engineer, with over 30 years experience in the computer industry, including 18 years at FSI International and earlier experience at Control Data, 3M and Dicomed. He has also recently developed a successful real estate practice. Eric coordinates our sales activities in the business data and VoIP business.

The Board of Directors (the "Board") of FSI International, Inc. (the "Company") has constituted and established a Corporate Governance and Nomination Committee (the "Committee") with authority, responsibility, and specific duties as described in this Corporate Governance and Nomination Committee Charter.