Rudolph Technologies Inc.

Christopher Breach Director of Field Service Operations and Applications Support. Christopher has 14 years of Engineering and R&D experience and recently joined RVSI. He holds a PhD in Physics and Physical Chemistry of Materials. Previously he was a researcher at A*STAR (Singapore) in micro-joining and substrates technology, Director of R&D, product development, applications R&D/customer applications in Kulicke & Soffa's Singapore Materials & Applications Center, project & development manager for a microelectronics sub-contractor, research scientist in a manufacturing technology research institute and ICI sponsored Research Associate at the Cavendish Laboratory, Cambridge.

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Mr. Ragazzo is an investment professional. He reviews investment opportunities with specific emphasis on analysis and due diligence for prospective investments. Prior to joining Abbott Capital in 2005, Mr. Ragazzo was a research analyst at Sidoti & Company, LLC, where he performed in-depth fundamental and statistical analysis on small and mid cap companies in the semiconductor capital equipment sector. Mr. Ragazzo also worked as a sales engineer at Enmark Associates, Inc. and at Rudolph Technologies, Inc. as a sales/application engineer. Mr. Ragazzo received his B.S. and M.S. in Materials Science and Engineering from Lehigh University and his M.B.A. from New York University and is a CFA charterholder.

John R. Whitten has served as one of the Company s directors since July 2006 upon his appointment to the Company s Board of Directors. From November 1995 to December 2003, Mr. Whitten served as Chief Financial Officer, Vice President and Treasurer of Applied Industrial Technologies, Inc., an industrial supply distributor. Mr. Whitten is a C.P.A. and holds a B.B.A. in Accounting from Cleveland State University. Mr. Whitten is currently an independent director overseeing 70 portfolios in the fund complex of American Century Companies, Inc., a registered investment company, or its wholly owned subsidiaries.

Aubrey C. Tobey has served as one of the Company s directors since October 1998. Since May 1987, Mr. Tobey has served as President of ACT International, a company which provides marketing and management services for high technology companies. Mr. Tobey holds a B.S. in Mechanical Engineering from Tufts University and an M.S. in Mechanical Engineering from the University of Connecticut. Mr. Tobey served as a director of Chartered Semiconductor Manufacturing, Ltd. until May 2003.

Mr. Berry brings more than 35 years of operating experience to Riverside, which he joined in 2002 as an Operating Partner. He currently serves as Executive Vice President of Applied Precision, and is also a member of the board of directors of Rudolph Technologies and Applied Precision. Prior to joining Riverside, Mr. Berry was President and Chief Operating Officer at Ultratech Stepper, Inc. (NASDAQ:UTEK), a manufacturer of semiconductor equipment. Before that, he was Director of International Operations at General Signal Corporation and Director of Marketing with Perkin Elmer Corporation (NYSE:PKI), both leading suppliers of semiconductor manufacturing equipment. Mr. Berry began his career at Bell Laboratories. He currently serves on the Board of Trustees of Polytechnic University, in Brooklyn, NY. He holds a Bachelor of Science degree in Electrical Engineering from the Polytechnic Institute of Brooklyn.

Leo Berlinghieri has served as one of the Company s directors since September 2008. Since July 2005, Mr. Berlinghieri has served as Chief Executive Officer and President of MKS Instruments, Inc., an equipment supplier to the semiconductor industry. From April 2004 to July 2005, Mr. Berlinghieri served as President and Chief Operating Officer and prior to that he served as Vice President and Chief Operating Officer from July 2003 to April 2004 for MKS Instruments, Inc. Mr. Berlinghieri is currently a board member of MKS Instruments, Inc.

Michael W. Wright has served as one of the Company s directors since February 2006 when the Company merged with August Technology Corporation. Since August 2006, Mr. Wright has served as the President and Chief Executive Officer of Octavian Scientific, Inc., a supplier to semiconductor manufacturers. From August 2005 to August 2006, he had been the Senior Advisor to the CEO of Entegris, Inc., a supplier to semiconductor manufacturers. From May 2002 to February 2005, he held the position of President and Chief Operating Officer of Entegris, Inc. From 1998 to May 2002, Mr. Wright served as President of the microelectronics group of Entegris, Inc. and as Executive Vice President of Entegris, Inc. Mr. Wright is a graduate of the U.S. Navy Nuclear Power Program. Mr. Wright served as a director of August Technology from March 2000 until February 2006.

THOMAS W. GOLONSKI , 65, was selected to be a director on February 11, 2003 and was elected by our stockholders on August 12, 2003. Mr. Golonski served as Chairman, President and Chief Executive Officer of National City Bank of Pennsylvania and Executive Vice President of National City Corporation from 1996 to 2005. He retired from National City in 2005. He is a director of several economic development organizations and active in other charitable and financial organizations. THOMAS G. GREIG , 60, was elected as a director on August 10, 1999 and appointed as non-executive Chairman of the Board in May 2004. Mr. Greig has been a Managing Director of Liberty Capital Partners, a private equity partnership, since 1998. He is also a director of publicly-held Rudolph Technologies, Inc., a number of privately-held companies and a public, not-for-profit foundation.