Materials International Inc.

Mr. Wadsworth recently retired as President of Wadsworth-Pacific Mfg. Associates, Inc, a sales and marketing organization providing leading edge materials to the semiconductor industry. Mr. Wadsworth earned his undergraduate degree from Harvard University and an MBA from Stanford University. Mr. Wadsworth currently serves on the board of directors of Semiconductor Equipment and Materials International (SEMI), a global trade organization and Tegal, Inc., a publicly-listed manufacturer of wafer fabrication equipment based in Petaluma, California .

Mary Puma has been Axcelis' Chairman since May of 2005 and CEO since January 2002. She played an instrumental role in the company's spin off from Eaton Corporation in 2000, when she was named president and chief operating officer. Puma joined the semiconductor business in 1998, when it was Eaton's Semiconductor Operation, first serving as the vice president of its implant business and then as the vice president for the total operation. Puma joined Eaton in May 1996 as the general manager of the company's commercial controls division. Prior to joining Eaton, she spent 15 years in various marketing and general management positions at five different General Electric business units. Puma holds a BA in economics, Phi Beta Kappa, from Tufts University and an MS in management from the MIT Sloan School. She is a member of the boards at Nordson Corporation, North Shore Medical Center and Semiconductor Equipment and Materials International (SEMI).

Mike Splinter is president and chief executive officer and member of the board of directors at Applied Materials since 2003. Splinter is a 30-year veteran of the semiconductor industry and has led Applied Materials to record revenue and profits during his tenure. Under his leadership, the company is helping drive global adoption of solar power by enabling a true inflection point in the cost-per-watt of solar energy. Splinter serves on a number of influential business and industry boards, and is currently chairman of the Technology CEO Council, (http://www.cspp.org) a group of high-tech CEOs who are helping drive new U.S. federal public policies that embrace U.S. competitiveness. He serves on the board of Semiconductor Equipment and Materials International (SEMI), the board of NASDAQ OMX Group, Inc. and the board of trustees for Santa Clara University. He chairs the board of directors for the Silicon Valley Leadership Group, an organization of California CEOs focused on housing, transportation, and the environment. Internationally, Splinter is a member of the Governor's Council of the World Economic Forum, and is active in the Forum's post-Gleneagles environment efforts. Prior to joining Applied Materials, Splinter was an executive at Intel Corporation where he held a number of positions in his 20 years at the company, including executive vice president and director of Sales and Marketing and executive vice president and general manager of the Technology and Manufacturing Group. Splinter began his career at Rockwell International in the firm's Electronics Research Center. During his tenure, he became manager of the company's Semiconductor Fabrication Operations and was awarded two patents. Author of numerous papers and articles, Splinter earned both bachelor of science and master of science degrees in electrical engineering from the University of Wisconsin, Madison.

Stephen S. Schwartz has served as our Chairman of the Board since January 2003. He has been a director since August 2002 when he was elected to the board in conjunction with his appointment as our President and Chief Executive Officer. He joined Asyst in January 2001 as Senior Vice President, Product Groups and Operations and became Executive Vice President, Product Groups and Operations in October 2001. Prior to joining us, he served as President of Consilium, a software company and wholly-owned subsidiary of Applied Materials, Inc., from May 1999 to January 2001. Between May 1997 and May 1999, Dr. Schwartz served as Vice President and General Manager of Applied Materials’ Global Service Business, a supplier of products and services to the global semiconductor industry. From September 1992 to May 1999, Dr. Schwartz also served as General Manager of Applied Materials’ High Temperature Films Division. From 1987 to 1992, Dr. Schwartz held various marketing, business development and engineering positions at Applied Materials. He has been a director of Semiconductor Equipment and Materials International, or SEMI, since July 2003.