Mattson Technology Inc.

As President and Chief Executive Officer, David L. Dutton serves on the Board of Directors and sets the direction of the organization, leading the executive team in establishing and realizing long-term strategies and objectives for corporate growth. Dave, a 25-year veteran of the semiconductor industry, joined Mattson Technology in 1994. In 1995, Dutton became Vice President and General Manger of the Plasma Strip Group, which he was instrumental in growing to help Mattson become a dominant leader in the global strip market. In 1998, he was promoted to Chief Operating Officer, setting him on the path toward the President and CEO position. Dave last served as the President of the Plasma Products Division until his appointment as President and CEO in late 2001. Prior to joining Mattson, he held key management positions at Intel and Maxim Integrated Products. In addition to his leadership role at Mattson, Dave is an active member of the community. He is a representative of the Silicon Valley Business Group (SVBG) on behalf of Mattson Technology. Mattson is also a member of the Bay Area Council. Dave received his Bachelor of Science degree from San Jose State University.

has served as a director since January 2001. Dr. Betz also serves as Chairman of the Company's Compensation Committee. Since August 2005, Dr. Betz has served as President and Chief Executive Officer of Advanced Energy Industries, Inc. Dr. Betz served as Chief Executive Officer of West STEAG Partners from August 2001 until August 2005, as Chairman of the Management Board and Chief Executive Officer of STEAG Electronic Systems AG from January 1996 to July 2001, and as a member of the Management Board of STEAG Electronic Systems AG from October 1992 to July 2001. Dr. Betz served as a member of the Management Board of STEAG AG from January 1997 to July 2001.

Andy Moring was appointed Mattson's Chief Financial Officer in June 2008. He is responsible for the strategic development and management of all financial, investor relations and information technology programs for the company. Moring served as Mattson's Corporate Controller for 2 years before becoming CFO. Prior to Mattson, Moring was at Applied Materials for over 17 years in progressively responsible positions in operations finance and corporate accounting, culminating in his appointment as Vice President of Internal Audit. Among his jobs there, Moring served as the Vice President of Financial Operations responsible for worldwide accounting during the implementation of Sarbanes-Oxley and other improvements in corporate governance at the company. Moring has a BS degree in Economics from University of California, Riverside and an MBA from Santa Clara University.

Nigel Wenden joined Mattson in August 2008 as Senior Vice President and General Manager of the Global Business Operations. He is responsible for the strategic management and development of Mattson’s business, leading the sales, services and logistics throughout the company's global regions. Nigel is a twenty-five year veteran of the semiconductor industry with broad experience in corporate operations. Prior to joining Mattson he was Executive Vice President & Director of Edwards. Before joining Edwards, he was the president and founder of NWC Consulting in Plano, Texas, which focused predominantly on the global semiconductor marketplace. Previously Nigel had worked for fifteen years at Mykrolis Corporation, a leading supplier of fluid purification, photo resist dispense, pressure measurement, flow, and vacuum control technologies for semiconductor manufacturing. He held steadily increasing roles of responsibility, culminating in his appointment in January 2001 as Vice President, Gas Products Business Unit, where he was responsible business development, worldwide marketing, product management, applications engineering, research & development, and finance. Nigel holds a B.S. in Electronic and Electrical Engineering from Lanchester University, England, where he graduated with Commendation for being one of the top three in his graduating class. He attended the Harvard Business School, where he studied Strategic Marketing; and has served as Chair of SEMI’s Sales and Marketing Executive.

Neal Holmlund is the Senior Vice President Operations at Mattson. Neal currently leads the company's global engineering, supply chain, quality, and environmental health and safety groups. He joined Mattson in 2000, and has served as General Manager of the Surface Cleaning Group, prior to his current role. Neal has over 20 years experience in management of capital equipment development and manufacturing, both inside and outside the semiconductor equipment industry. He holds a BS degree in Chemical Engineering from Stanford University and an MBA from the Wharton School, University of Pennsylvania.