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- Thermoelectric Micro-Device Fabricated by a mems-Like Electrochemical Process
- This white precisely reveals about Microelectromechanical systems (MEMS) that are the basis of many rapidly growing technologies, because they combine miniature sensors and actuators with communications and electronics at low cost. Commercial MEMS fabrication processes are limited to silicon-based materials or two-dimensional structures. The paper shows an inexpensive, electrochemical technique...
- White papers 2003-07-27
- mems and Microstructures Technology (MST): An Applications and Market Evaluation, Second Edition
- It has taken 22 years, but the promise of MEMS/MST technology has moved into production, will generate over US$ 17 billion in revenue in 2002, and is forecast to generate in excess of US$ 34 billion by 2006. Unit consumption of MEMS/MST devices is expected to rise from approximately 3.5...
- White papers 2002-08-01
- The Application of Nanosecond-Pulsed Laser Welding Technology in mems Packaging With a Shadow Mask
- This white paper discusses about the nanosecond-pulsed laser bonding process. The paper gives an insight about the optical bonding energy for glass-to-silicon bonding using a 4 micrometer thick indium layer as bonding material. It also shows simulation results in the form of localized heating that can be achieved by using...
- White papers 2002-05-31
- Investigating the Viability of mems Vapor Sensors for Detecting Land Mines
- This white paper reports the design specification and process for constructing a gas identification instrument using MEMS technology for the purpose of detecting buried land mines. The aim is to design an instrument to detect and identify gases that leak from buried land mines using an array of sensors and...
- White papers 2000-10-01
- Microstructures Technology (MST) and mems: An Industry and Market Evaluation
- MicroStructures (or MicroSystems) Technology (MST) is an outgrowth of semiconductor technology. It was found, over twenty years ago, that selective doping and etching could produce three-dimensional elements on a silicon wafer and, that by utilizing "sacrificial" layers, it was possible to selectively undercut some of these elements to allow them...
- White papers 2000-05-01
Additional Resources
- Multilevel Behavioral Simulation Of VCSEL Based Optoelectronic Modules
- The assembly within a single optoelectronic interconnect module of different components, including Vertical Cavity Surface Emitting Laser (VCSEL) and photodiode arrays, optical fibers and electronics implying electrical, optical, mechanical and thermal interactions, introduces new constraints in the conception phase and necessitates a new and different approach for modeling and simulation....
- White papers 2003-05-28
- Mock CMOS: An Inexpensive, Fast, and Versatile Microfabrication Technique Using One Metal and One Silicon Dioxide Film
- This technical report deals with a versatile fabrication process that allows users to quickly construct micro machined structures using a one metal, one silicon dioxide film stack on silicon. This simplified process, called Mock CMOS, starts from pre-processed wafers and requires only one photolithography step, provides a conductor material for...
- White papers 2002-05-07
- Desalination Coupled With Salinity-Gradient Solar Ponds
- Thermal desalination by salinity-gradient solar ponds (SGSP) is one of the most promising solar desalination technologies. Solar ponds combine solar energy collection with long-term storage and can provide reliable thermal energy at temperature ranges from 50 to 90°C. A small multi-effect, multi-stage flash distillation (MEMS) unit, a membrane distillation unit,...
- White papers 2000-11-12
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