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- Indoor GPS Metrology System With 3D Probe for Precision Applications
- There is an increasing demand from industry for intelligent reverse engineering solutions. The demand from industry is to be able to perform reverse engineering, to create CAD models, or to compare prototypes with CAD models. This paper describes this new three-dimensional, non-contact metrology system designed to measure the position and...
- White papers 2004-07-06
Additional Resources
- Micronic Laser Systems AB wins new order for mask metrology system
- NORDIC BUSINESS REPORT-21 April 2004-Micronic Laser Systems AB wins new order for mask metrology systemC1994-2004 M2 COMMUNICATIONS LTD http://www.m2.com The Swedish laser pattern generators developer and manufacturer Micronic Laser Systems AB said on Wednesday (21 April) that it had received an order for an MMS15000 mask metrology system from...
- Research articles 2004-04-21
- Veeco Releases Next-Gen Optical Metrology System for Semiconductor Packaging Inspection
- Wireless News 08-25-2007 Veeco Releases Next-Gen Optical Metrology System for Semiconductor Packaging Inspection WIRELESS NEWS-August 25, 2007-Veeco Releases Next-Gen Optical Metrology System for Semiconductor Packaging Inspection C2007 10Meters - http://www.10meters.com Veeco Instruments announced the release of...
- Research articles 2007-08-25
- SensArray Offers Wireless Temperature Metrology System
- Wireless News 07-05-2004 SensArray Offers Wireless Temperature Metrology System WIRELESS NEWS-5 July 2004-SensArray Offers Wireless Temperature Metrology System C2004 10Meters - http://www.10meters.com SensArray, a provider of process optimization tools for semiconductor fabrication, is introducing its Integrated...
- Research articles 2004-07-05
- Swedish high-tech company Micronic Laser Systems AB wins MMS mask metrology system order from Asian customer
- NORDIC BUSINESS REPORT-1 November 2007-Swedish high-tech company Micronic Laser Systems AB wins MMS mask metrology system order from Asian customerC1994-2007 M2 COMMUNICATIONS LTD http://www.m2.com Swedish high-tech company Micronic Laser Systems AB said on Thursday (1 November) that it has secured an order for a MMS mask metrology system from...
- Research articles 2007-11-01
- KLA Ships 300th Overlay and CD Metrology System to Seagate Technology
- SAN JOSE, Calif.--BUSINESS WIRE--Feb. 9, 1996--The Metrology Group of KLA Instruments Corporation today announced the shipment of the 300th KLA Coherence Probe Metrology system, a KLA 5107, to Seagate Technology in Minneapolis, Minnesota.The 5107, specifically designed for TFH (thin-film head) process control, is the newest model in the KLA 5000...
- Research articles 1996-02-09
- Nanometrics Debuts NanoSpec Film Metrology System - Product Announcement
- Metrology company Nanometrics Inc., Sunnyvale, Calif., has rolled out the latest version of its NanoSpec 9000 thin film measurements system, the NanoSpec 9200, an automated film metrology system designed to complement and improve equipment efficiency. The company said that it features the latest generation spectroscopic reflectometer, pattern recognition, auto-focus, and...
- Research articles 2000-06-26
- KLA-Tencor Unveils 65nm Metrology System (Electronic News)
- KLA-Tencor has unveiled a new thin-film metrology system to enable cost effective production control for film processes at the 65 nanometer node and below. KLA-Tencor has unveiled a new thin-film metrology system to enable cost effective production control for film processes at the 65 nanometer...
- Research articles 2004-12-06
- KLA-Tencor Accelerates Customers' 45nm Immersion Lithography Yield and Productivity With New Archer 100 Optical Overlay Metrology System
- CHIBA, Japan -- KLA-Tencor, Inc. (NASDAQ:KLAC), the world leader in overlay metrology technology, today introduced the Archer[TM] 100 optical overlay metrology system, a 45nm-generation tool designed to significantly enhance the precision and productivity of immersion and future double patterning lithography technologies. The market-leading Archer platform has been extensively re-designed to...
- Research articles 2006-12-07
- Metrology System: Optical Gaging Products.(Brief Article)
- Metrology System Optical Gaging Products Rochester, NY www.ogpnet.com Optical Gaging Products introduces the new SmartScope[R] Quest 600, a complete multi-sensor solution for dimensional metrology of small parts, carriers full of small parts, or parts as much as 24 inches long. The SmartScope Quest...
- Research articles 2001-08-01
- SensArray introduces Thermal TRACK 5 Bluetooth-enabled metrology system for IC equipment and process optimization.
- SensArray Corporation, a provider of process optimization tools for semiconductor fabrication, has announced the availability of the Thermal TRACK 5 metrology system with Bluetooth-enabled ISIS Intelligent Sensor Interface System 5 data acquisition hardware. Designed for real time, in situ wafer temperature measurements, this...
- Research articles 2003-11-17
- Zygo Corporation Receives Order for New Ink Jet Printing Metrology System
- Zygo Corporation (NASDAQ: ZIGO) announced today that its Display Solutions Division received an order in excess of $1.4 million for its DropShotTM Flat Panel Metrology system. The DropShotTM system is specifically designed to operate with the latest OLED and LCD ink jet printing technologies to analyze product quality and...
- Research articles 2006-10-04
- KLA-Tencor Launches New Archer 200 Overlay Metrology System for 32nm Lithography Control
- SAN JOSE, Calif. -- KLA-Tencor (NASDAQ:KLAC) today introduced its latest overlay metrology system, the Archer 200, featuring an enhanced optical system that provides significant performance improvements that are critical to help customers meet the much tighter overlay requirements for double-patterning lithography at the 32nm design rule node.
- Research articles 2008-06-05
- SensArray Announces Wireless Temperature Metrology System for Production Surveys; Low Profile Integrated Wafer Monitors Critical Lithography Processes for Improved CD Control
- FREMONT, Calif. -- SensArrayR Corporation, an innovative provider of process optimization tools for semiconductor fabrication, announces availability of its Integrated Wafer wireless temperature metrology system. This low profile product incorporates a data acquisition system within a wafer helping customers better manage their critical lithography processes. With components embedded in...
- Research articles 2004-07-06
- Metrology System.(Nova Measuring instruments Ltd)(Brief Article)
- NovaTrack 2020 integrated metrology system can inspect 100% of wafers for macro defects [greater than]40 [micro]m and overlay control. All measurements and inspection routines are done in parallel to track processing. The system includes a small measurement unit within the track, using the track's internal robot...
- Research articles 2001-06-15
- SensArray Introduces Thermal TRACK 5 Bluetooth-Enabled Metrology System for IC Equipment and Process Optimization
- Business Editors/High-Tech Writers FREMONT, Calif.--BUSINESS WIRE--Nov. 12, 2003 Wireless, Compact, PDA-Based Tool Enables Greater Measurement Accuracy SensArrayR Corporation, a leading provider of process optimization tools for semiconductor fabrication, today announced the availability of the Thermal TRACKTM 5 metrology system with BluetoothTM-enabled ISIS Intelligent Sensor Interface System 5...
- Research articles 2003-11-12
- Nikon Announces Improved Metrology System for 1Gb DRAM Generation Photomasks and Reticles
- BELMONT, Calif.--BUSINESS WIRE--Aug. 7, 1995--Nikon Precision Inc. NPI, the North American subsidiary of Nikon Corporation, announced today significant performance specification improvements in the Nikon XY-5i coordinate metrology system which, together with several new features, help to ensure the quality of 1 gigabit Gb DRAM photomasks and reticles.
- Research articles 1995-08-07
- Corning Tropel Introduces the FlatMaster® 1400; A New Optical Metrology System for Large LCD Image Mask Manufacturers
- FAIRPORT, N.Y. -- Corning Tropel Corporation, a wholly owned subsidiary of Corning Incorporated (NYSE: GLW), today announced the introduction of the FlatMasterR 1400 Liquid Crystal Display LCD Image Mask Flatness Metrology System. Corning Tropel is an industry leader in providing flatness measurement technology and has expanded its capabilities to include...
- Research articles 2006-05-25
- Metrology system.(New Products)
- MetriX 100 is an inline, non-contact metrology system to provide independent measurements of composition and thickness of nretal fihns on product wafers. It is suited to production line monitoring at the 90 mn node and process development for 65 nm and below. The unit uses a ...
- Research articles 2003-12-01
- Zygo Corporation Receives Follow-On UniFire-7900(TM) Order for Back End of Line Metrology
- Zygo Corporation (NASDAQ: ZIGO), a worldwide optical metrology supplier, today announced that it has received a follow-on order from a leading semiconductor manufacturer for its new fully automated metrology system, the UniFire-7900TM. The system will be used to consolidate lithography metrology tools in 300mm wafer fabrication and is expected...
- Research articles 2008-03-11
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